✦ LIBER ✦
Thin films prepared by plasma polymerization of methyl-methacrylate and their properties as an electron beam resist
✍ Scribed by L MartinŮ; H Biederman
- Publisher
- Elsevier Science
- Year
- 1983
- Tongue
- English
- Weight
- 229 KB
- Volume
- 33
- Category
- Article
- ISSN
- 0042-207X
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