Spray coating of PMMA for pattern transfer via electron beam lithography on surfaces with high topography

✍ Scribed by J. Linden; Ch. Thanner; B. Schaaf; S. Wolff; B. Lägel; E. Oesterschulze

• Book ID: 104052865
• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 435 KB
• Volume: 88
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2010.12.106