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Plasma immersion ion implantation: duplex layers from a single process

✍ Scribed by R. Hutchings; G.A. Collins; J. Tendys

Book ID: 103631767
Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 598 KB
Volume: 51
Category: Article
ISSN: 0257-8972
DOI: 10.1016/0257-8972(92)90287-k

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