Formation of Ge nanocrystals in a silicon dioxide layer using pulsed plasma-immersion ion implantation

✍ Scribed by Young Min Kim; Min-Kyu Jeong; Ki-Heung Park; Sang-Goo Jung; Sung-Ho Bae; Jong-Ho Lee

• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 469 KB
• Volume: 86
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2008.12.096