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Germanium nanoparticles formation in silicon dioxide layer by multi-energy implantation of Ge negative ions and their photo-luminescence

✍ Scribed by Nobutoshi Arai; Hiroshi Tsuji; Hiroyuki Nakatsuka; Kenji Kojima; Kouichirou Adachi; Hiroshi Kotaki; Toyotsugu Ishibashi; Yasuhito Gotoh; Junzo Ishikawa


Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
600 KB
Volume
147
Category
Article
ISSN
0921-5107

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