✦ LIBER ✦
From plasma immersion ion implantation to deposition: a historical perspective on principles and trends
✍ Scribed by André Anders
- Book ID
- 108423048
- Publisher
- Elsevier Science
- Year
- 2002
- Tongue
- English
- Weight
- 381 KB
- Volume
- 156
- Category
- Article
- ISSN
- 0257-8972
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