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Plasma-Enhanced CVD Synthesis and Structural Characterization of Ta2N3

✍ Scribed by Alexei Yu. Ganin; Lorenz Kienle; Grigori V. Vajenine


Publisher
John Wiley and Sons
Year
2004
Tongue
English
Weight
201 KB
Volume
2004
Category
Article
ISSN
1434-1948

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