Growth and characterization of fluorocarbon thin films grown from trifluoromethane (CHF3) using pulsed-plasma enhanced CVD

✍ Scribed by Edmund J. Winder; Karen K. Gleason

• Publisher: John Wiley and Sons
• Year: 2000
• Tongue: English
• Weight: 152 KB
• Volume: 78
• Category: Article
• ISSN: 0021-8995
• DOI: 10.1002/1097-4628(20001024)78:4<842::aid-app180>3.0.co;2-j