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Synthesis of Al2O3–SiO2 Films by Ar/O2 Plasma-Enhanced CVD from Alkoxide Precursors

✍ Scribed by Y. Li; S. Shimada; A. Hirose

Publisher
John Wiley and Sons
Year
2006
Tongue
English
Weight
445 KB
Volume
12
Category
Article
ISSN
0948-1907

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