✦ LIBER ✦

Plasma-Enhanced Atomic Layer Deposition of TaN Thin Films Using Tantalum-Pentafluoride and N[sub 2]∕H[sub 2]∕Ar Plasma

✍ Scribed by Chung, Hoi-Sung; Kwon, Jung-Dae; Kang, Sang-Won

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

TiO[sub 2]∕Al[sub 2]O[sub 3]∕TiO[sub 2]

✍ Jeon, Woojin; Chung, Hoi-Sung; Joo, Daekwon; Kang, Sang-Won 📂 Article 📅 2008 🏛 The Electrochemical Society 🌐 English ⚖ 307 KB

Interface effect on dielectric constant

✍ Park, Pan Kwi; Cha, Eun-Soo; Kang, Sang-Won 📂 Article 📅 2007 🏛 American Institute of Physics 🌐 English ⚖ 460 KB

Atomic layer deposition of Ru thin film

✍ Tae Eun Hong; Ki-Yeung Mun; Sang-Kyung Choi; Ji-Yoon Park; Soo-Hyun Kim; Taehoon 📂 Article 📅 2012 🏛 Elsevier Science 🌐 English ⚖ 789 KB

NANOMIXED TiO 2 -Ga 2 O 3 THIN FILMS GRO

✍ LIU, G. X.; SHAN, F. K.; LEE, W. J.; LEE, G. H.; KIM, I. S.; SHIN, B. C. 📂 Article 📅 2006 🏛 Taylor and Francis Group 🌐 English ⚖ 747 KB

Structural and electrical properties of

✍ Yu-Ri Shin; Won-Sub Kwack; Yun Chang Park; Jin-Hyock Kim; Seung-Yong Shin; Kyoun 📂 Article 📅 2012 🏛 Elsevier Science 🌐 English ⚖ 602 KB

The effects of UV radiation on SiC(O)N/S

✍ Navamathavan, R.; Kim, Chang Young; Lee, Heon Ju; Yu, YoungHun; Choi, Chi Kyu 📂 Article 📅 2013 🏛 Elsevier Science 🌐 English ⚖ 500 KB