✦ LIBER ✦
The effects of UV radiation on SiC(O)N/SiOC(−H) thin films grown on Si substrates using plasma-enhanced atomic layer deposition
✍ Scribed by Navamathavan, R.; Kim, Chang Young; Lee, Heon Ju; Yu, YoungHun; Choi, Chi Kyu
- Book ID
- 120159823
- Publisher
- Elsevier Science
- Year
- 2013
- Tongue
- English
- Weight
- 500 KB
- Volume
- 547
- Category
- Article
- ISSN
- 0040-6090
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