Physics of Submicron Devices

✍ Scribed by David K. Ferry, Robert O. Grondin (auth.)

• Publisher: Springer US
• Year: 1991
• Tongue: English
• Leaves: 408
• Series: Microdevices
• Edition: 1
• Category: Library

✦ Synopsis

The purposes of this book are many. First, we must point out that it is not a device book, as a proper treatment of the range of important devices would require a much larger volume even without treating the important physics for submicron devices. Rather, the book is written principally to pull together and present in a single place, and in a (hopefully) uniform treatment, much of the understanding on relevant physics for submicron devices. Indeed, the understand­ ing that we are trying to convey through this work has existed in the literature for quite some time, but has not been brought to the full attention of those whose business is the making of submicron devices. It should be remarked that much of the important physics that is discussed here may not be found readily in devices at the 1.0-JLm level, but will be found to be dominant at the O.I-JLm level. The range between these two is rapidly being covered as technology moves from the 256K RAM to the 16M RAM chips.

✦ Table of Contents

Front Matter....Pages i-xiii
An Introductory Review....Pages 1-49
Fabrication Techniques for Submicron Devices....Pages 51-89
Heterojunctions and Interfaces....Pages 91-136
Semiclassical Carrier Transport Models....Pages 137-171
Transient Hot-Carrier Transport....Pages 173-241
Alloys and Superlattices....Pages 243-277
The Electron-Electron Interaction....Pages 279-296
Lateral Surface Superlattices....Pages 297-313
Quantum Transport in Small Structures....Pages 315-362
Noise in Submicron Devices....Pages 363-396
Back Matter....Pages 397-402

✦ Subjects

Solid State Physics;Spectroscopy and Microscopy;Condensed Matter Physics;Crystallography;Electrical Engineering;Optical and Electronic Materials