<p><P><EM>Silicon Devices and Process Integration</EM> is compiled from industrial and academic lecture notes and reflects years of experience in the development of silicon devices. It is prepared specifically for engineers and scientists in semiconductor research, development and manufacturing. It
Silicon Devices and Process Integration: Deep Submicron and Nano-Scale Technologies
โ Scribed by Badih El-Kareh (auth.)
- Publisher
- Springer US
- Year
- 2009
- Tongue
- English
- Leaves
- 613
- Edition
- 1
- Category
- Library
No coin nor oath required. For personal study only.
โฆ Subjects
Circuits and Systems; Electronics and Microelectronics, Instrumentation; Electrical Engineering; Materials Science, general
๐ SIMILAR VOLUMES
<p><P><EM>Silicon Devices and Process Integration</EM> is compiled from industrial and academic lecture notes and reflects years of experience in the development of silicon devices. It is prepared specifically for engineers and scientists in semiconductor research, development and manufacturing. It
<p><span>The book presents the basic steps and the technical implementation of individual processes for microelectronic circuit integration in silicon. Interaction and influences of e. g. oxidation, etching, doping and thermal processes for integrating CMOS- and Bipolar circuits are discussed in det
Nanophotonics is a field of science and technology based on the manipulation of light with equally miniscule structures, in the same way that computer chips are used to route and switch electrical signals. By enabling new high bandwidth, high speed optoelectronic components, nanophotonics has the po