Silicon Processing for the VLSI Era, Vol. 4: Deep-Submicron Process Technology
โ Scribed by Stanley Wolf
- Publisher
- Lattice Press
- Year
- 2002
- Tongue
- English
- Leaves
- 422
- Category
- Library
No coin nor oath required. For personal study only.
๐ SIMILAR VOLUMES
Volume 3: The Submicron MOSFET. Treats the topics of submicron MOSFET device physics and the relationship between such device physics and submicron MOSFET fabrication. DLC: Integrated circuits - Very large scale.
The companion volumes to this book are Volume 1- Process Technology and Volume 3- The Submicron MOSFET
<p><P><EM>Silicon Devices and Process Integration</EM> is compiled from industrial and academic lecture notes and reflects years of experience in the development of silicon devices. It is prepared specifically for engineers and scientists in semiconductor research, development and manufacturing. It