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Physicochemical analysis of InAs gas phase epitaxy in the InAs-AsCl3-H2 system I: Thermodynamic considerations

✍ Scribed by L. Hitova; E.P. Trifonova; I.N. Kishmar; M. Apostolova

Publisher: Elsevier Science
Year: 1987
Tongue: English
Weight: 326 KB
Volume: 147
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(87)90037-x

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## Abstract For reactions taking place between the species Ga, As~2~, As~4~, AsH~3~, and H~2~, the equilibrium constants were calculated. The discussion indicates that factors other than thermodynamic considerations significantly influence the deposition process. Kinetic investigations demonstrate