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A thermodynamic factor influencing the growth rate and purity of epitaxial layers in the Ga-AsCl3-H2 system

✍ Scribed by Kenji Morizane; Yoshifumi Mori

Publisher: Elsevier Science
Year: 1978
Tongue: English
Weight: 557 KB
Volume: 45
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(78)90429-3

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