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A study of equilibrium reactions in the Ga-PCl3-H2 and Ga-AsCl3-H2 epitaxial systems

✍ Scribed by Přemysl Klíma; Jiří Šilhavý; Vlastimil Řeřábek; Ivo Braun; Čestmír Černý; Petr Voňka; Robert Holub

Publisher: Elsevier Science
Year: 1976
Tongue: English
Weight: 633 KB
Volume: 32
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(76)90108-1

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## Abstract For reactions taking place between the species Ga, As~2~, As~4~, AsH~3~, and H~2~, the equilibrium constants were calculated. The discussion indicates that factors other than thermodynamic considerations significantly influence the deposition process. Kinetic investigations demonstrate