Physicochemical analysis of InAs gas phase epitaxy in the InAs-AsCl3-H2 system II: InAs transport and epitaxial growth kinetics

✍ Scribed by E.P. Trifonova; L. Hitova

• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 364 KB
• Volume: 147
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(87)90038-1