Phase and Optical Characterizations of Annealed SnO Thin Films and Their p-Type TFT Application
β Scribed by Liang, Ling Yan; Liu, Zhi Min; Cao, Hong Tao; Yu, Zheng; Shi, Yuan Yuan; Chen, Ai Hua; Zhang, Hai Zhong; Fang, Yan Qun; Sun, Xi Lian
- Book ID
- 119946188
- Publisher
- The Electrochemical Society
- Year
- 2010
- Tongue
- English
- Weight
- 477 KB
- Volume
- 157
- Category
- Article
- ISSN
- 0013-4651
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P-type transparent conducting antimony-doped tin oxide (ATO) films were successfully fabricated on quartz glass substrates by radiofrequency magnetron sputtering using a 20 mol.% Sb-doped SnO 2 ceramic target. The deposited films were annealed at different temperatures for different durations. Hall
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