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Structural, electrical and optical properties of p-type transparent conducting SnO2:Al film derived from thermal diffusion of Al/SnO2/Al multilayer thin films

✍ Scribed by J. Zhao; X.J. Zhao; J.M. Ni; H.Z. Tao


Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
622 KB
Volume
58
Category
Article
ISSN
1359-6454

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✍ J. Ni; X. Zhao; X. Zheng; J. Zhao; B. Liu πŸ“‚ Article πŸ“… 2009 πŸ› Elsevier Science 🌐 English βš– 683 KB

P-type transparent conducting antimony-doped tin oxide (ATO) films were successfully fabricated on quartz glass substrates by radiofrequency magnetron sputtering using a 20 mol.% Sb-doped SnO 2 ceramic target. The deposited films were annealed at different temperatures for different durations. Hall