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The structural, optical and electrical properties of Y-doped SnO thin films and their p-type TFT application

โœ Scribed by Liang, Ling Yan; Liu, Zhi Min; Cao, Hong Tao; Xu, Wang Ying; Sun, Xi Lian; Luo, Hao; Cang, Kai


Book ID
120814992
Publisher
Institute of Physics
Year
2012
Tongue
English
Weight
765 KB
Volume
45
Category
Article
ISSN
0022-3727

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P-type transparent conducting antimony-doped tin oxide (ATO) films were successfully fabricated on quartz glass substrates by radiofrequency magnetron sputtering using a 20 mol.% Sb-doped SnO 2 ceramic target. The deposited films were annealed at different temperatures for different durations. Hall