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Microstructure, optical, and electrical properties of p-type SnO thin films

✍ Scribed by Guo, W.; Fu, L.; Zhang, Y.; Zhang, K.; Liang, L. Y.; Liu, Z. M.; Cao, H. T.; Pan, X. Q.


Book ID
124077131
Publisher
American Institute of Physics
Year
2010
Tongue
English
Weight
533 KB
Volume
96
Category
Article
ISSN
0003-6951

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P-type transparent conducting antimony-doped tin oxide (ATO) films were successfully fabricated on quartz glass substrates by radiofrequency magnetron sputtering using a 20 mol.% Sb-doped SnO 2 ceramic target. The deposited films were annealed at different temperatures for different durations. Hall