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Performance and reliability improvements in poly-Si TFT's by fluorine implantation into gate poly-Si

✍ Scribed by Maegawa, S.; Ipposhi, T.; Maeda, S.; Nishimura, H.; Ichiki, T.; Ashida, M.; Tanina, O.; Inoue, Y.; Nishimura, T.; Tsubouchi, N.

Book ID: 114536087
Publisher: IEEE
Year: 1995
Tongue: English
Weight: 698 KB
Volume: 42
Category: Article
ISSN: 0018-9383
DOI: 10.1109/16.387244

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