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Simple fabrication of offset-gated poly-Si TFTs by in situ fluorine passivation and excimer-laser doping

✍ Scribed by Cheon-Hong Kim; Sang-Hoon Jung; Juhn-Suk Yoo; Min-Koo Han


Book ID
117150464
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
181 KB
Volume
266-269
Category
Article
ISSN
0022-3093

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