Improved Electrical Performance and Reliability of Poly-Si TFTs Fabricated by Drive-In Nickel-Induced Crystallization with Chemical Oxide Layer

✍ Scribed by Ming-Hui Lai; YewChung Sermon Wu; Chih-Pang Chang

• Book ID: 107457178
• Publisher: Springer US
• Year: 2011
• Tongue: English
• Weight: 571 KB
• Volume: 40
• Category: Article
• ISSN: 0361-5235
• DOI: 10.1007/s11664-011-1522-3