Patterning of silicon wafers using the plasma jet dry etching technique

✍ Scribed by A.M Barklund; H.-O Blom; S Berg; L Bardos

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 301 KB
• Volume: 41
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(90)93816-2