✦ LIBER ✦
7623. Patterning of silicon wafers using the plasma jet dry etching technique: A M Barklund et al, Vacuum, 41, 1990, 899–901
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 155 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0042-207X
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