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Original and sputtering induced interface roughness in AES sputter depth profiling of SiO2/Ta2O5 multilayers

โœ Scribed by A Rar; I Kojima; D.W Moon; S Hofmann


Book ID
114086807
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
277 KB
Volume
355-356
Category
Article
ISSN
0040-6090

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