A comparison between electron energy loss spectroscopy and Auger electron spectroscopy sputtering depth profiles of Ta2O5/Ta

✍ Scribed by J.M. Sanz; S. Hofmann

• Publisher: Elsevier Science
• Year: 1984
• Tongue: English
• Weight: 227 KB
• Volume: 120
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(84)90294-3