✦ LIBER ✦

Organosilicon thin films deposited by plasma enhanced CVD: Thermal changes of chemical structure and mechanical properties

✍ Scribed by L. Zajíčková; V. Buršíková; Z. Kučerová; J. Franclová; P. Sťahel; V. Peřina; A. Macková

Book ID: 108191351
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 212 KB
Volume: 68
Category: Article
ISSN: 0022-3697
DOI: 10.1016/j.jpcs.2007.02.044

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Structure and Thermal Properties of Thin

Structure and Thermal Properties of Thin Film Poly(α-methylstyrene) Deposited via Plasma-Enhanced Chemical Vapor Deposition

✍ D.D. Burkey; K.K. Gleason 📂 Article 📅 2003 🏛 John Wiley and Sons 🌐 English ⚖ 400 KB

## Abstract Plasma‐enhanced (PE) CVD from α‐methylstyrene is a dry method for synthesizing directly patternable sacrificial materials for generating pores or air dielectric layers. Films deposited at low power excitation (40 W) decompose between 65 °C and 75 °C, leave minimal residue following a 40

Structure, Composition, Mechanical, and

Structure, Composition, Mechanical, and Tribological Properties of BCN Films Deposited by Plasma Enhanced Chemical Vapor Deposition

✍ D. Kurapov; J. M. Schneider 📂 Article 📅 2005 🏛 Springer 🌐 English ⚖ 221 KB

Comparative investigations of structure

Comparative investigations of structure and properties of BCN coatings deposited by thermal and plasma-enhanced CVD

✍ S. Stöckel; K. Weise; T. Thamm; K.-U. Körner; D. Dietrich; G. Marx 📂 Article 📅 2003 🏛 Springer 🌐 English ⚖ 408 KB

The relationship between chemical struct

The relationship between chemical structure and dielectric properties of plasma-enhanced chemical vapor deposited polymer thin films

✍ Hao Jiang; Lianggou Hong; N. Venkatasubramanian; John T. Grant; Kurt Eyink; Kevi 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 546 KB

Stress hysteresis and mechanical propert

Stress hysteresis and mechanical properties of plasma-enhanced chemical vapor deposited dielectric films

✍ Thurn, Jeremy; Cook, Robert F.; Kamarajugadda, Mallika; Bozeman, Steven P.; Stea 📂 Article 📅 2004 🏛 American Institute of Physics 🌐 English ⚖ 366 KB

Thermal Annealing Effects on the Mechani

Thermal Annealing Effects on the Mechanical Properties of Plasma-Enhanced Chemical Vapor Deposited Silicon Oxide Films

✍ Schliwinski, H. -J. 📂 Article 📅 1992 🏛 The Electrochemical Society 🌐 English ⚖ 749 KB