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Comparative investigations of structure and properties of BCN coatings deposited by thermal and plasma-enhanced CVD

✍ Scribed by S. Stöckel; K. Weise; T. Thamm; K.-U. Körner; D. Dietrich; G. Marx

Publisher
Springer
Year
2003
Tongue
English
Weight
408 KB
Volume
375
Category
Article
ISSN
1618-2650

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