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Structural and optical properties of amorphous selenium prepared by plasma-enhanced CVD

โœ Scribed by P. Nagels; E. Sleeckx; R. Callaerts; L. Tichy

Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
375 KB
Volume
94
Category
Article
ISSN
0038-1098

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Si 1-x Ge x films with nanodot arrays are prepared on anodic aluminum oxide (AAO) templates by plasma-enhanced (PE)CVD. The structure and morphology of the films are investigated using X-ray diffraction (XRD) spectroscopy and transmission electron microscopy (TEM). It is found that the size of the S