Structural, optical and electrical properties of amorphous silicon thin films prepared by sputtering with different targets

✍ Scribed by Yi Qin; Tao Feng; Zhiqiang Li; Zhuo Sun

• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 845 KB
• Volume: 257
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2011.04.053