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Electrical and optical properties of ZnO films prepared by sputtering of ZnO targets containing AlN

✍ Scribed by K. Kobayashi; Y. Kondo; Y. Tomita; Y. Maeda; S. Matsushima


Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
454 KB
Volume
253
Category
Article
ISSN
0169-4332

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