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Optical emission spectroscopy of glow discharge plasma from SiH4−CH4 system

✍ Scribed by Mitsuya Motohashi; Kenta Ashibu; Yasutaka Hiruta; Kazuaki Homma

Publisher
John Wiley and Sons
Year
2007
Tongue
English
Weight
960 KB
Volume
90
Category
Article
ISSN
8756-663X

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In order to perform the analysts of fluorine in Grimm-type glow-discharge emission specu-ometry, the specwa of flumine emitted by a neon as well as an argon plasma were investigated. While it was hard to detect fluorine emission lines ia the argon plasma, not only the atomic lines but also the ionic