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Optical effects and microstructure of buried insulator layer formed by O+and N+Co-implantation

โœ Scribed by Yu Yuehui; Lin Chenglu; Zhu Wenhua; Zou Shichang; Lu Jiang


Book ID
112890578
Publisher
SP Science Press
Year
1992
Tongue
English
Weight
476 KB
Volume
9
Category
Article
ISSN
0217-9822

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