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Optical and structural properties of 6H–SiC implanted with silicon as a function of implantation dose and temperature

✍ Scribed by R Héliou; J.L Brebner; S Roorda


Book ID
114164564
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
113 KB
Volume
175-177
Category
Article
ISSN
0168-583X

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