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Electrical properties of high-dose nitrogen-implanted and rapid thermal annealed 6H–SiC

✍ Scribed by K. Abe; O. Eryu; O. Kogi; K. Nakashima


Book ID
114167232
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
203 KB
Volume
206
Category
Article
ISSN
0168-583X

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