Surface characterization of high-dose Sb+ implanted rapid thermal annealed monocrystalline silicon

✍ Scribed by S.N Kumar; G Chaussemy; M Charbonnier; B Canut; A Laugier; M Romand

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 464 KB
• Volume: 4
• Category: Article
• ISSN: 0921-5107
• DOI: 10.1016/0921-5107(89)90238-9