✦ LIBER ✦
Thermal wave characterization of silicon which had been high energy ion implanted and furnace annealed
✍ Scribed by G.M. Crean; M.G. Somekh; S.J. Sheard; C.W. See
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 331 KB
- Volume
- 2
- Category
- Article
- ISSN
- 0921-5107
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