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Structural and compositional characterization of 6H–SiC implanted with N+ and Al+ ions using optical methods

✍ Scribed by Pezoldt, J; Yankov, R.A; Werninghaus, T; Zahn, D.R.T; Fukarek, W; Teichert, G; Luebbe, M; Skorupa, W

Book ID
122719309
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
163 KB
Volume
8
Category
Article
ISSN
0925-9635

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