Structural and compositional characterization of X-cut LiNbO3 crystals implanted with high energy oxygen and carbon ions
✍ Scribed by G.G. Bentini; M. Bianconi; A. Cerutti; M. Chiarini; G. Pennestrì; C. Sada; N. Argiolas; M. Bazzan; P. Mazzoldi; R. Guzzi
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 109 KB
- Volume
- 240
- Category
- Article
- ISSN
- 0168-583X
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✦ Synopsis
High energy implantation of medium-light elements such as oxygen and carbon was performed in X-cut LiNbO 3 single crystals in order to prepare high quality optical waveguides. The compositional and damage profiles, obtained by exploiting the secondary ion mass spectrometry and Rutherford back-scattering techniques respectively, were correlated to the structural properties measured by the high resolution X-ray diffraction. This study evidences the development of tensile strain induced by the ion implantation that can contribute to the decrease of the ordinary refractive index variation through the photo-elastic effect.
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