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Structural and optical properties of 6H–SiC helium-implanted at 600 K

✍ Scribed by H.H. Zhang; C.H. Zhang; B.S. Li; L.H. Han; Y. Zhang

Publisher: Elsevier Science
Year: 2010
Tongue: English
Weight: 816 KB
Volume: 268
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2010.04.012

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Structural and optical properties of 6H–SiC helium-implanted at 600&#xa0;K

Structural and optical properties of 6H–SiC helium-implanted at 600 K