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Optical and morphological properties of SiNx/Si amorphous multilayer structures grown by Plasma Enhanced Chemical Vapor Deposition

✍ Scribed by G. Santana; O. de Melo; J. Aguilar-Hernández; B. M. Monroy; J. Fandiño; F. Cruz; A. Ortiz; G. Contreras-Puentes; J. C. Alonso


Publisher
John Wiley and Sons
Year
2005
Tongue
English
Weight
296 KB
Volume
2
Category
Article
ISSN
1862-6351

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