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Optical and interfacial properties of SiO2 films deposited on Si by photo-CVD

โœ Scribed by Kohji Inoue; Masanori Okuyama; Yoshihiro Hamakawa


Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
369 KB
Volume
41-42
Category
Article
ISSN
0169-4332

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