✦ LIBER ✦
SiO2 film growth by double-excitation photo-CVD using Si3H8 and O2
✍ Scribed by Masanori Okuyama; Noriaki Fujiki; Kouji Inoue; Yoshihiro Hamakawa
- Publisher
- Elsevier Science
- Year
- 1988
- Tongue
- English
- Weight
- 294 KB
- Volume
- 33-34
- Category
- Article
- ISSN
- 0169-4332
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