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XPS and ARXPS investigations of ultra thin TaN films deposited on SiO2 and Si

โœ Scribed by M. Zier; S. Oswald; R. Reiche; K. Wetzig

Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
323 KB
Volume
252
Category
Article
ISSN
0169-4332

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