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The properties of SiO2 films using direct photo-chemical vapor deposition on strained SiGe layers

โœ Scribed by C.T. Lin; S.J. Chang; D.K. Nayak; Y. Shiraki


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
312 KB
Volume
92
Category
Article
ISSN
0169-4332

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