Physical and electrical properties of CoSi2 thin films on silicon, and on silicon substrates buffered with SiO2 and yttria-stabilized zirconia, using the laser physical vapor deposition technique

✍ Scribed by P. Tiwari; M. Bhatnagar; R. Dat; J. Narayan

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 679 KB
• Volume: 14
• Category: Article
• ISSN: 0921-5107
• DOI: 10.1016/0921-5107(92)90323-2