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Optical properties of reactive ICB aluminum oxide films deposited on Si(100)

โœ Scribed by F.K. Urban III; L.L. Levenson; H. Hashimoto; H. Usui; I. Yamada; T. Takagi


Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
274 KB
Volume
33-34
Category
Article
ISSN
0169-4332

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